JPS6183030U - - Google Patents
Info
- Publication number
- JPS6183030U JPS6183030U JP16785684U JP16785684U JPS6183030U JP S6183030 U JPS6183030 U JP S6183030U JP 16785684 U JP16785684 U JP 16785684U JP 16785684 U JP16785684 U JP 16785684U JP S6183030 U JPS6183030 U JP S6183030U
- Authority
- JP
- Japan
- Prior art keywords
- blocks
- heating element
- shaped
- hook
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16785684U JPH0110921Y2 (en]) | 1984-11-05 | 1984-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16785684U JPH0110921Y2 (en]) | 1984-11-05 | 1984-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6183030U true JPS6183030U (en]) | 1986-06-02 |
| JPH0110921Y2 JPH0110921Y2 (en]) | 1989-03-29 |
Family
ID=30725642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16785684U Expired JPH0110921Y2 (en]) | 1984-11-05 | 1984-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0110921Y2 (en]) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02154420A (ja) * | 1988-12-06 | 1990-06-13 | Tel Sagami Ltd | 熱処理装置 |
| JPH1167424A (ja) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | ヒータ支持装置 |
| JP2009180462A (ja) * | 2008-01-31 | 2009-08-13 | Tokyo Electron Ltd | 熱処理炉 |
| JP2011258544A (ja) * | 2010-05-11 | 2011-12-22 | Hitachi Kokusai Electric Inc | ヒータ支持装置 |
| JP2020043260A (ja) * | 2018-09-12 | 2020-03-19 | 住友金属鉱山株式会社 | 多結晶膜の成膜方法、基板載置機構および成膜装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH079036Y2 (ja) * | 1990-11-13 | 1995-03-06 | 東京エレクトロン東北株式会社 | 縦型熱処理炉 |
-
1984
- 1984-11-05 JP JP16785684U patent/JPH0110921Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02154420A (ja) * | 1988-12-06 | 1990-06-13 | Tel Sagami Ltd | 熱処理装置 |
| JPH1167424A (ja) * | 1997-08-20 | 1999-03-09 | Kokusai Electric Co Ltd | ヒータ支持装置 |
| JP2009180462A (ja) * | 2008-01-31 | 2009-08-13 | Tokyo Electron Ltd | 熱処理炉 |
| JP2011258544A (ja) * | 2010-05-11 | 2011-12-22 | Hitachi Kokusai Electric Inc | ヒータ支持装置 |
| JP2020043260A (ja) * | 2018-09-12 | 2020-03-19 | 住友金属鉱山株式会社 | 多結晶膜の成膜方法、基板載置機構および成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0110921Y2 (en]) | 1989-03-29 |